Semiconductor-On-Insulator Devices and Associated Methods
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United States of America Patent
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Issued Date -
Jul 4, 2013
app pub date -
Sep 17, 2012
filing date -
Sep 16, 2011
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Abandoned
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Abstract
Semiconductor-on-insulator (SOI) devices and associated methods are provided. In one aspect, for example, a method for making a SOI device can include forming a device layer on a front side of a semiconductor layer, bonding a first substrate to the front side of the device layer, processing the semiconductor layer on a back side opposite the device layer to form a processed surface, and bonding a second substrate to the processed surface. In some aspects, the method can further include removing the first substrate from the front side to expose the device layer. In one aspect, forming the device layer can include forming optoelectronic circuitry at the front side of the semiconductor layer.
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