ADAPTER FOR COUPLING A DIFFUSION FURNACE SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Jul 4, 2013
app pub date -
Dec 29, 2011
filing date -
Dec 29, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Importance

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Abstract
An adapter is provided for fluidly coupling a process chamber, such as a diffusion furnace or a process tube, and a fluid source, such as a torch chamber or combustion chamber, of a system for processing semiconductor material. The process tube and the torch chamber include joint segments that can engage directly together to fluidly couple the torch chamber to the process tube for introducing a fluid, such as an oxidizing gas or vapor, into the process tube. The process chamber and the torch chamber are formed of materials having different rates of thermal expansion. The adapter is configured to couple the joint segments of the torch chamber and the process tube while accommodating the differences in thermal expansion between the materials. The adapter may be formed of quartz to couple a quartz torch chamber with a silicon carbide process tube.
First Claim
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Family
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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STMICROELECTRONICS PTE LTD | SINGAPORE |
International Classification(s)

- 2011 Application Filing Year
- B23P Class
- 3713 Applications Filed
- 656 Patents Issued To-Date
- 17.67 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Liang, Ying Shun | Singapore, SG | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 | |||
McKee, Samuel Gordon | Sengkang, SG | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 |
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Patent Citation Ranking
- 0 Citation Count
- B23P Class
- 0 % this patent is cited more than
- 12 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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