MICROELECTROMECHANICAL SYSTEM
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United States of America Patent
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Issued Date -
Jul 4, 2013
app pub date -
Dec 19, 2012
filing date -
Dec 29, 2011
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Abstract
A microelectromechanical system for detecting accelerations about or along an X-axis, Y-axis, and/or Z-axis, having a substrate and having a driving mass and a detection mass (1) disposed parallel to the substrate in an X-Y plane and mounted displaceably relative to the substrate. At least one slit (5) is disposed in the driving and/or detection mass (1) for compensating for distortions due to residual material stresses in the driving and/or detection mass (1).
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