APPARATUS FOR THE SELECTIVE SEPARATION OF TWO LAYERS OF MATERIAL USING AN ULTRASHORT PULSE SOURCE OF ELECTROMAGNETIC RADIATION
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app pub date -
Feb 20, 2013
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Oct 23, 2009
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Abstract
A direct-write apparatus and end use device for selective separation of at least one layer of material from another layer of material at the interface between them using a beam of electromagnetic radiation from an ultrashort pulse source is disclosed.
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