Robotic device for substrate transfer applications
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United States of America Patent
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Jan 20, 2015
Grant Date -
Jun 27, 2013
app pub date -
Dec 21, 2011
filing date -
Dec 21, 2011
priority date (Note) -
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Abstract
A device for use in the semiconductor industry includes a robotic arm whose end effector includes electromagnetic means to hold a substrate carrier. A pushing member can move independently of a flat, spatula-like portion of the device and is configured to exert force against the substrate carrier while the spatula-like portion is retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the spatula-like portion is retracted.
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