ULTRASONIC CLEANING METHOD

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United States of America Patent

APP PUB NO 20130160791A1
SERIAL NO

13618784

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An ultrasonic cleaning method for cleaning an object in a solution having a gas dissolved therein includes irradiating ultrasonic waves to the solution having a first dissolved gas concentration. While the ultrasonic waves are being irradiated to the solution, a dissolved gas concentration in the solution is changed from the first dissolved gas concentration to a second dissolved gas concentration that is lower than the first dissolved gas concentration such that sonoluminescence occurs.

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Patent Owner(s)

Patent OwnerAddress
SILTRONIC AGEINSTEINSTR 172 TOWER B / BLUE TOWER 81677 MÜNCHEN 81677

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haibara, Teruo Hikari, JP 50 136
Kubo, Etsuko Hikari, JP 11 23
Mori, Yoshihiro Shunan, JP 193 5414
Uchibe, Masashi Hikari, JP 11 23

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