Method for Polymer Plasma Deposition

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United States of America Patent

APP PUB NO 20130158189A1
SERIAL NO

13809309

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Abstract

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The present invention is related to a method or the deposition of a chlorinated polymeric layer onto a ubstrate, said method comprising the steps of:—generating a plasma in a gaseous medium by means of a plasma device;—placing the substrate in contact with the plasma, or in the post-plasma area;—introducing in said plasma or in the post-plasma area a chlorinated precursor of the chlorinated polymer.

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Patent Owner(s)

Patent OwnerAddress
UNIVERSITE LIBRE DE BRUXELLESBRUSSELS BELGIUM BRUSSELS BRUSSELS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hubert, Julie Bruxelles, BE 4 3
Reniers, Francois Bruxelles, BE 6 43

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