PROCESS FOR PRODUCTION OF SILANE AND HYDROHALOSILANES

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United States of America Patent

APP PUB NO 20130156675A1
SERIAL NO

13328820

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Abstract

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Embodiments of a system and process for the production of ultra-high purity silane and hydrohalosilanes of the general formula HySiX4-y (y=1, 2, or 3) by a reactive distillation method are disclosed.

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Patent Owner(s)

Patent OwnerAddress
REC SILICON INC3322 ROAD N NE MOSES LAKE WA 98837

International Classification(s)

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  • 2011 Application Filing Year
  • C01B Class
  • 1180 Applications Filed
  • 922 Patents Issued To-Date
  • 78.14 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2011201220132014201520162017201820192020202120220255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Breneman, William C Moses Lake, US 14 132

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  • 8 Citation Count
  • C01B Class
  • 11.67 % this patent is cited more than
  • 12 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges512767323442111101 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 90100 +020406080100120140160180200220240260280300

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