ARRANGEMENT FOR HOLDING A PARTICLE BEAM APPARATUS
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United States of America Patent
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Issued Date -
Jun 20, 2013
app pub date -
Dec 19, 2011
filing date -
Dec 19, 2011
priority date (Note) -
Abandoned
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Abstract
An arrangement for holding a particle beam device, in particular an electron beam device, on at least one base structure, includes at least one receiving unit, at least one damping unit which is to be positioned between the base structure and the receiving unit, at least one damping element being arranged at the receiving unit, and at least one holding element being arranged at the damping element.
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