Method And Device for The Depollution Of A Pelliculated Reticle

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United States of America Patent

APP PUB NO 20130152977A1
SERIAL NO

13819408

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Abstract

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The object of the present invention is a device for depolluting a non-sealed, confined environment (1) having a natural leakage (6) and including an interior space (9) bounded by a wall (7), comprising a depollution enclosure (11, 30) means (32, 42) for pumping gas and means (33, 43) for introducing gas. The depollution enclosure (11, 30) has at least two chambers (12, 13; 31, 41) separated by a sealing wall (14, 49). A first chamber (12, 31) is constituted by the part of the enclosure that is situated is contact with the wall (7) of the non-sealed, confined environment (1) and cooperates with first means for pumping (42) and first means for introducing gas (43), and a second chamber (13, 41) is constituted by the part of the enclosure which is situated in contact wife the natural leakage (6) from the non-sealed, confined environment (1) and cooperates with second means for pumping (42) and second means for introducing gas (43). The first and second means for pumping gas (32) and (42) have a pumping capacity which can vary independently, and the first and second means for introducing gas (33) and (43) having a gas injection flow rate which can vary independently. The device for depollating also has means to control the difference in pressure between the interior space (9) and the first chamber (12, 31).

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Patent Owner(s)

Patent OwnerAddress
ADIXEN VACUUM PRODUCTS74009 ANNECY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bounouar, Julien Annecy, FR 13 49
Favre, Arnaud Annecy, FR 13 42
Hadj, Rabah Smail Annecy, FR 1 2

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