METHOD AND APPARATUS FOR MONITORING AND CONTROLLING CRYSTAL GROWTH, AND PROBE SYSTEM
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United States of America Patent
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Issued Date -
Jun 20, 2013
app pub date -
Jul 23, 2012
filing date -
Dec 16, 2011
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Abandoned
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Abstract
In a method for monitoring and controlling crystal growth during a crystal growing procedure, heights of a plurality of measuring points on a solid-liquid interface of a crystal material disposed in a crucible are measured, and at least one parameter of the crystal growing procedure is optimized based on the measured heights, so that the solid-liquid interface maintains a dome shape with a predetermined curvature during the crystal growing procedure.
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