Linearly-Actuated Low Stress Fluid Delivery Apparatus For Vacuum Environments
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United States of America Patent
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Issued Date -
Jun 6, 2013
app pub date -
Dec 3, 2012
filing date -
Dec 5, 2011
priority date (Note) -
Abandoned
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Abstract
A connector comprised of a fluid delivery means for conveying a fluid to a component, a compliant tube that surrounds the fluid delivery means and that is fluid-tight, and a load transfer means positioned outside of the compliant tube for relieving stress on the compliant tube that arises when the compliant tube undergoes linear motion. The fluid delivery means may be the tubes that convey a cooling fluid to a component in a thin film plating apparatus. The compliant tube may be a tube that contains a bellows section. The load transfer means may comprise a pair of rods positioned outside of the compliant tube that run parallel to the compliant tube.
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