BELT CONVEYOR FOR CONVEYING SOLAR WAFERS DURING FABRICATION

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United States of America Patent

APP PUB NO 20130140135A1
SERIAL NO

13309699

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed is a belt conveyor, which conveys solar wafers during fabrication, comprising: i) a plurality of endless metal strips for supporting the solar wafers; ii) a plurality of rotatable pulleys configured to receive the plurality of endless metal strips, and which rotate to convey each of the plurality of endless metal strips along a continuous path to thereby convey the solar wafers; and iii) an inspection device configured to inspect the solar wafers while the solar wafers are being conveyed by the plurality of endless metal strips.

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Patent Owner(s)

Patent OwnerAddress
ASM TECHNOLOGY SINGAPORE PTE LTDSINGAPORE SHUN SHUN ROAD 2 NO 7 SINGAPORE CITY SINGAPORE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tan, Lian Hok Singapore, SG 8 36
Tu, Wen Ge Singapore, SG 4 14

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