MULTI-LAYER CHIP FOR GAS CHROMATOGRAPHY AND FABRICATION METHOD THEREOF
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United States of America Patent
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Issued Date -
May 30, 2013
app pub date -
Dec 22, 2011
filing date -
Nov 28, 2011
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Abandoned
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Abstract
Disclosed herein are a multi-layer chip for gas chromatography and a method of fabricating the multi-layer chip. The multi-layer chip is fabricated by: forming fine channels at the same positions of a plurality of substrates using only a single photo mask and an alignment key; and stacking the substrates. That is, the multi-layer chip can be fabricated by a simple method, and the total length of the fine channels can be increase without a limit by stacking more substrates. In addition, layers of the substrates can be coated with different stationary phases, and a temperature control device can be attached to heat transfer contact portions of the multi-layer chip for controlling the temperature of the multi-layer chip rapidly and precisely. Therefore, the multi-layer chip may be useful for high-separability gas chromatography to separate and analyze an infinitesimal amount of a sample.
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