ELECTROMAGNETIC WAVE SENSOR AND A METHOD FOR FABRICATING IT
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United States of America Patent
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Issued Date -
May 23, 2013
app pub date -
Nov 17, 2011
filing date -
Nov 17, 2011
priority date (Note) -
Abandoned
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Abstract
A sensor for measuring electromagnetic power in a dielectric waveguide structure includes an antenna element for detecting heating caused by electromagnetic power absorbed into the antenna element. A membrane forming at least partially a thermally insulating layer is implemented on a surface of the dielectric waveguide structure being a substrate for the sensor. The antenna element is implemented on a surface of the membrane and the antenna element is at least partially thermally insulated with a cavity from the substrate. A method for fabricating the sensor is also described.
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