METHOD OF MANUFACTURING GAS BARRIER FILM
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United States of America Patent
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Issued Date -
May 16, 2013
app pub date -
Jul 1, 2011
filing date -
Jul 22, 2010
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Abandoned
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Abstract
A method of manufacturing a gas barrier film inhibits modification-suppressing adsorbed substances from being taken in a coating film to further improve gas barrier performance. In the method, a coating solution containing polysilazane is coated, followed by application of a VUV radiation treatment. In addition, a method of manufacturing a gas barrier film includes coating a coating solution containing polysilazane on a surface of a film to form a coating film, followed by making the resulting film pass through a drying zone, and exposing the surface of the coating film to vacuum UV radiation to conduct a modification treatment. An oxygen concentration in the drying zone, achieved by supplying inert gas into the drying zone, is 10% or less.
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