Wafer Transport Cart
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
May 16, 2013
app pub date -
Nov 14, 2011
filing date -
Nov 14, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Systems and methods are disclosed for transporting wafers to a processing apparatus. The system comprises a frame having a support sized for receiving a wafer assembly including the wafers. An alignment system is connected to the frame. The alignment system is disposed for guiding the wafer assembly to a first position as the wafer assembly is lowered onto the support of the frame. The alignment system reduces the amount of time required to transport the wafers to the processing apparatus.
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