COOLED CHARGED PARTICLE SYSTEMS AND METHODS
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United States of America Patent
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Issued Date -
May 16, 2013
app pub date -
Jun 4, 2012
filing date -
Jun 18, 2009
priority date (Note) -
Abandoned
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Abstract
Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.
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