MULTILAYER RARE-EARTH OXIDE COATINGS AND METHODS OF MAKING
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United States of America Patent
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Issued Date -
May 9, 2013
app pub date -
Oct 19, 2012
filing date -
Nov 3, 2011
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Abstract
Embodiments relate to a coated substrate and a method of making and using the same. A plasma-spray coated layer may be formed on a substrate, wherein the plasma-sprayed coated layer comprises a rare-earth oxide (e.g., yttrium oxide), a rare-earth fluoride (e.g. yttrium fluoride), or a rare-earth silicate (e.g. yttrium silicate). An exposed surface of the plasma-spray coated layer may be irradiated to form a treated portion of the layer, wherein the treated portion of the layer has a mean spacing of local peaks (S value) between about 100 and 200 microns. A second layer may be formed on the treated portion of the plasma-spray coated layer, wherein the second layer comprises a dielectric material.
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