ION BEAM EXTRACTION ELECTRODE AND ION SOURCE
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United States of America Patent
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Issued Date -
May 2, 2013
app pub date -
Oct 30, 2012
filing date -
Oct 31, 2011
priority date (Note) -
Abandoned
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Abstract
An ion beam extraction electrode includes an electrode frame and a plurality of ion extracting aperture forming members. The plurality of ion extracting aperture forming members are arranged at an interval in a direction. At least one end of each ion extracting aperture forming member is movably supported. The plurality of ion extracting aperture forming members include at least one first ion extracting aperture forming member having a body portion of a substantially bar shape and a first transition portion extending from the body portion. The first transition portion comes in contact with a second ion extracting aperture forming member which is adjacent to the first ion extracting aperture forming member. Further, an ion source includes a plasma vessel having a cathode therein, and at least one sheet of ion beam extraction electrode set forth which is disposed adjacent to the plasma vessel.
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