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Abstract

Method of characterizing a crystalline specimen (E), characterized in that it comprises the steps consisting in: a) directing a substantially mono-energetic beam (F1) of projectiles chosen from atoms and ions onto a surface, called the top surface, of said specimen, the direction of propagation of said beam being characterized by an angle of incidence (θ_i) and by what is called an azimuthal angle (φ) measured in the plane of said surface, the energy of said projectiles being equal to or greater than 50 keV; b) the projectiles scattered by the specimen are filtered in terms of energy, those of said projectiles that are scattered with a defined energy are detected and their scattering angle (θ_d), defined in a plane perpendicular to said top surface of the specimen, is measured; c) steps a) and b) are repeated for a number of different values of said azimuthal angle; and d) an image representative of the number of detected projectiles as a function of the scattering angle and of said azimuthal angle is constructed. Computer program product specifically designed for implementing such a method.

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First Claim