METHODS AND APPARATUS FOR THE CLOSED-LOOP FEEDBACK CONTROL OF THE PRINTING OF A MULTILAYER PATTERN

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United States of America Patent

APP PUB NO 20130102103A1
SERIAL NO

13658648

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Abstract

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Embodiments of the present invention provide apparatus and methods for closed-loop control utilized in printing a multilayer pattern on a substrate. In one embodiment, a solar cell formation process is provided. The process comprises positioning a substrate on a substrate receiving surface of a printing station, printing a first patterned layer on a region of the substrate, acquiring a first optical image of the first patterned layer and storing the first optical image in a buffer, printing a second patterned layer over the region of the substrate, wherein the second patterned layer is aligned over the region of the substrate using information received from the acquired first optical image.

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Patent OwnerAddress
APPLIED MATERIALS ITALIA S R LVIA POSTUMIA OVEST 244 FRAZIONE OLMI SAN BIAGIO DI CALLALTA (TV) 31048

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boscolo, Marchi Enrico Chioggia, IT 3 6
Caliazzo, Marco Padova (pd), IT 1 6
CELLERE, Giorgio Torri Di Quartesolo (vi), IT 26 100
De, Santi Luigi Spresiano, IT 24 40
Vercesi, Tommaso Silea, IT 26 73
Villalta, Alberto Motta di Livenza, IT 1 6
Voltan, Alessandro Legnaro (pd), IT 4 23

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