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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CARL ZEISS SMT AG	GERMANY COHEN OBERKOCHEN BADEN-WURTTEMBERG

International Classification(s)

• G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Baier, Juergen	Oberkochen, DE	10	36
Burkart, Stefan	Heidenheim, DE	8	73
Chung, Hin Yiu	Ulm, DE	4	326
Dengel, Guenther	Heidenheim, DE	12	90
Dinger, Udo	Oberkochen, DE	55	998
Enkisch, Hartmut	Aalen, DE	33	113
Kourouklis, Christos	Aalen, DE	2	13
Rennon, Siegfried	Wuerzburg, DE	6	30
Warm, Berndt	Schwaig, DE	22	229
Wiesner, Stefan	Lauchheim, DE	19	132

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2013/0100,426

METHOD FOR PRODUCING FACET MIRRORS AND PROJECTION EXPOSURE APPARATUS

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