METHOD AND APPARATUS FOR THE FORMATION OF SOLAR CELLS WITH SELECTIVE EMITTERS

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United States of America Patent

APP PUB NO 20130095579A1
SERIAL NO

13650907

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Abstract

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Methods and apparatus for forming solar cells with selective emitters are provided. A method includes positioning a substrate on a substrate receiving surface. The substrate has a surface comprising a first patterned heavily doped region having a first dopant concentration that defines the selective emitters, and a second doped emitter region having a second dopant concentration that is less than the first dopant concentration, wherein the second doped emitter region surrounds the first patterned heavily doped region. The method further comprises determining a position of the first patterned heavily doped region by using a Fourier transform to process a filtered optical image, aligning one or more distinctive elements in a screen printing mask with the first patterned heavily doped region by using information received from the determined position of the first patterned heavily doped region, and depositing a layer of material on a portion of the first patterned heavily doped region.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ITALIA S R LVIA POSTUMIA OVEST 244 FRAZIONE OLMI SAN BIAGIO DI CALLALTA (TV) 31048

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Budiarto, Edward Fremont, US 18 154
Egan, Todd Fremont, US 58 521

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