CLOSED LOOP PROCESS FOR PREPARING TRICHLOROSILANE FROM METALLURGICAL SILICON
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United States of America Patent
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Issued Date -
Apr 18, 2013
app pub date -
Dec 16, 2010
filing date -
Jan 18, 2010
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a multistage process for preparing trichlorosilane and silicon tetrachloride from metallurgical silicon, in which trichlorosilane and silicon tetrachloride are prepared from metallurgical silicon in a first step, and the silicon tetrachloride is processed further to the trichlorosilane end product in a second step. The present invention further relates to a plant in which such processes can be performed in an integrated manner.
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