TESTING DEVICE FOR TESTING PLATES FOR ELECTRONIC CIRCUITS AND RELATIVE METHOD

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United States of America Patent

APP PUB NO 20130093441A1
SERIAL NO

13646791

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Abstract

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A testing device (100) is disclosed for testing wafers (11), comprising a measuring head (10) provided with three functional blocks (12, 13, 14), each able to move independently from the others, to carry out different resistive measurements on a cell or wafer (11). Each of the functional blocks (12, 13, 14) supports respective measuring probes (15), suitable to be placed into contact with metallization lines or fingers (16), made on the wafers (11).

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ITALIA S R LVIA POSTUMIA OVEST 244 FRAZIONE OLMI SAN BIAGIO DI CALLALTA (TV) 31048

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Galiazzo, Marco Padova (pd), IT 26 83
Martire, Marco Longobardi, IT 1 2
Tonini, Diego Treviso, IT 13 48
Voltan, Alessandro Legnaro (pd), IT 4 23

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