Bonded Substrate And Method Of Manufacturing The Same

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United States of America Patent

APP PUB NO 20130093059A1
SERIAL NO

13649732

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Abstract

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A bonded substrate, the surface roughness of which is reduced, and a method of manufacturing the same. The bonded substrate includes a base substrate and an intermediate layer disposed on the base substrate. The intermediate layer has a greater bubble diffusivity than the base substrate. A thin film layer is bonded onto the intermediate layer, and has a different chemical composition from the base substrate.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG CORNING PRECISION MATERIALS CO LTD644-1 JINPYEONG-DONG GUMI-SI GYEONGSANGBUK-DO 730-360

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jang, BongHee ChungCheongNam-Do, KR 4 9
Jeon, JongPil ChungCheongNam-Do, KR 15 3
Jung, Kyungsub ChungCheongNam-Do, KR 11 3
Kim, A-Ra ChungCheongNam-Do, KR 5 20
Kim, Dong-Woon ChungCheongNam-Do, KR 8 108
Kim, Donghyun ChungCheongNam-Do, KR 289 2560
Kim, MinJu ChungCheongNam-Do, KR 41 54
Shur, Joong Won ChungCheongNam-Do, KR 4 12

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