CONCENTRIC FLOW-THROUGH PLASMA REACTOR AND METHODS THEREFOR
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United States of America Patent
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app pub date -
Dec 6, 2012
filing date -
Jul 10, 2007
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Abstract
The present invention provides a radiofrequency plasma apparatus for the production of nanoparticles and method for producing nanoparticles using the apparatus. The apparatus is designed to provide high throughput and makes the continuous production of bulk quantities of high-quality crystalline nanoparticles possible. The electrode assembly of the plasma apparatus includes an outer electrode and a central electrode arranged in a concentric relationship to define an annular flow channel between the electrodes.
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