METHOD FOR ACQUIRING PROCESS PARAMETERS FOR A FILM WITH A TARGET TRANSMITTANCE
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United States of America Patent
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Issued Date -
Apr 4, 2013
app pub date -
Nov 28, 2012
filing date -
Aug 24, 2011
priority date (Note) -
Abandoned
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Abstract
In a method for acquiring process parameters for a film, a computer divides parameter sets into a training data group and a test data group. Then, the computer inputs the training data group to a neural network (NN) so as to obtain relationship among parameter sets of the training data group and transmittances, and uses the test data group to estimate accuracy of the NN. Further, the computer modifies the NN until an error value of estimated parameters, which are acquired by the NN according to the obtained relationship, is smaller than a predetermined value, and uses the NN to acquire practical parameters corresponding to a target transmittance when the error value is smaller than the predetermined value.
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