Method and device for moving a sensor close to a surface
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United States of America Patent
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Issued Date -
Apr 4, 2013
app pub date -
Oct 3, 2012
filing date -
Oct 3, 2011
priority date (Note) -
Abandoned
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Abstract
A method and a system for positioning a sensor of an electrostatic force microscope is disclosed. In a method according to the invention, the AC bias voltage and DC bias voltage systems of the EFM are utilized to determine a sensor sensitivity “G”, which is then used to adjust the position of the sensor or the AC bias voltage in a manner that reduces the risk of arcing and/or contact between the sensor and the surface to be analyzed.
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