CORROSION RESISTANT MEMBER AND METHOD FOR MANUFACTURING THE SAME
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United States of America Patent
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Sep 7, 2012
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Sep 30, 2011
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Abstract
The present invention relates to a corrosion resistant member including: a substrate composed of a ceramic or a metal, and at least one layer of a corrosion resistant film formed on a surface of at least a region of the substrate to be exposed to plasma or a corrosive gas, in which the corrosion resistant film contains yttria as a main component and further also contains at least one of tantalum and niobium in an amount of 0.02 to 10 mol % in terms of pentoxide relative to the yttria, and a non-melted portion is not present in the corrosion resistant film.
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