Memory Device Using Multiple Tunnel Oxide Layers
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United States of America Patent
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Issued Date -
Apr 4, 2013
app pub date -
Sep 30, 2011
filing date -
Sep 30, 2011
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Abandoned
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Abstract
A memory element (ME) including at least one layer of conductive metal oxide (CMO) that includes mobile oxygen ions and including at least two layers of insulating metal oxide (IMO) is disclosed. In one configuration a layer of IMO that is directly in contact with a CMO layer is specifically selected so that a material of the IMO layer is non-reactive with a material of the CMO. In another configuration, at least one pair of adjacent IMO layers are made from materials having different band gaps operative to an generate an internal electric field positioned in the layers and present in the at least two adjacent IMO layers in the absence of electrical power. The internal electric field can be a static electric field. The IMO and/or CMO layers can be deposited in part or in whole using ALD, PEALD, or nano-deposition. The ME can be formed BEOL.
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