PRE-ALIGNED MULTI-BEAM NOZZLE/SKIMMER MODULE
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United States of America Patent
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Issued Date -
Apr 4, 2013
app pub date -
Sep 30, 2011
filing date -
Sep 30, 2011
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Abstract
A pre-aligned multi-output nozzle/skimmer (PMNS) module includes a pre-aligned nozzle assembly having at least two nozzles and a pre-aligned skimmer subassembly. The PMNS module can be pre-aligned to more accurately position a Multi-Beam Gas Cluster Ion Beam (MBGCIB), and to more accurately control the formation of the multi-beam gas clusters of a pre-aligned MBGCIB.
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