UV Irradiation Apparatus Having UV Lamp-Shared Multiple Process Stations
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United States of America Patent
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Issued Date -
Mar 21, 2013
app pub date -
Sep 21, 2011
filing date -
Sep 21, 2011
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Abstract
A UV irradiation apparatus for treating substrates includes: at least two process stations each provided with a UV transmissive window; at least one electric UV lamp using two electrodes in a gas tube extending over the UV transmissive windows of the process stations aligned along the gas tube and shared by the process stations; a UV transmissive zone disposed between the UV lamp and the process stations and provided with reflectors; and shutters for blocking UV light from being transmitted to the respective process stations independently.
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