RESONANT MATERIAL LAYER APPARATUS, METHOD AND APPLICATIONS
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United States of America Patent
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Issued Date -
Mar 14, 2013
app pub date -
Sep 7, 2012
filing date -
Sep 8, 2011
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Abandoned
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Abstract
A resonant structure and a method for fabricating the resonant structure each include a substrate that includes at least one cavity. The resonant structure and the method for fabricating the resonant structure also include a resonant material layer located and formed over the substrate and at least in-part covering the at least one cavity. The resonant structure may comprise a graphene resonator structure.
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