VACUUM COATING APPARATUS AND METHOD FOR DEPOSITING NANOCOMPOSITE COATINGS
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United States of America Patent
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Issued Date -
Mar 7, 2013
app pub date -
Aug 30, 2012
filing date -
Aug 31, 2011
priority date (Note) -
Abandoned
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Abstract
A vacuum coating apparatus and method comprising a vacuum chamber, at least one pair of opposing cathodes, a power supply adapted to supply an AC voltage to said opposing cathodes to operate them in a dual magnetron sputtering mode, wherein at least one further cathode for PVD coating is provided in said vacuum chamber, characterized in that the at least one further cathode is a magnetron cathode and a further power supply is provided in the form of a pulsed power supply or a DC power supply is provided which is connectable to the magnetron cathode or arc cathode.
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