METHOD OF FABRICATING POROUS FILM STRUCTURE USING DRY PROCESSES AND POROUS FILM STRUCTURES FABRICATED BY THE SAME
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Feb 28, 2013
app pub date -
Aug 20, 2012
filing date -
Aug 23, 2011
priority date (Note) -
Abandoned
status (Latency Note)
Importance
|
US Family Size
|
Non-US Coverage
|
Abstract
Provided are a method of fabricating a porous thin film structure, by forming a thin film from at least two elements, followed by selectively removing the certain element using a dry etching process, and a porous thin film structure fabricated by the same. Because all processes of the method of fabricating a porous thin film structure are dry processes, process control is simply accomplished, environmental impact is low, and mass production is possible, in contrast to when using a typical wet process such as electrodeposition or dealloying. Also, since a level of porosity is easily controlled and maintained uniform, a mesoporous thin film structure showing a reproducible level of sensitivity when used as a sensor can be fabricated.
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| KR | A | KR20130023011 | Oct 31, 2011 |
| KR | A | KR20140016404 | Jan 03, 2014 |
International Classification(s)
- 2012 Application Filing Year
- C22C Class
- 982 Applications Filed
- 876 Patents Issued To-Date
- 89.21 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 8 Citation Count
- C22C Class
- 13.08 % this patent is cited more than
- 12 Age