SUBSTRATE INVERTING APPARATUS, SUBSTRATE HANDLING METHOD, AND SUBSTRATE PROCESSING APPARATUS
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United States of America Patent
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Issued Date -
Feb 28, 2013
app pub date -
Jul 24, 2012
filing date -
Aug 26, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A substrate inverting apparatus includes a plurality of first lower guides supporting a substrate in a horizontal orientation by contact of first lower inclined portions with a peripheral edge portion of the substrate, a plurality of first upper guides that, by contact of first upper inclined portions with the peripheral edge portion of the substrate, clamp the substrate in cooperation with the plurality of first lower guides, a guide moving mechanism that moves the plurality of first upper guides and first lower guides horizontally, and a guide rotating unit that inverts the substrate by rotating the plurality of first upper guides and first lower guides around a horizontally extending inversion axis.
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