INSPECTION SYSTEM AND A METHOD FOR INSPECTING MULTIPLE WAFERS
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United States of America Patent
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Issued Date -
Feb 28, 2013
app pub date -
Aug 1, 2012
filing date -
Aug 22, 2011
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Abandoned
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Abstract
A method and an inspection system that includes: a multi wafer support device arranged to concurrently support multiple wafers; optics arranged to acquire images of the multiple wafers supported by the multi wafer support element;
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