SEMICONDUCTOR PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF

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United States of America Patent

APP PUB NO 20130049198A1
SERIAL NO

13366367

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Abstract

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A method of manufacturing a semiconductor package structure is provided. A chip is provided. An active surface of the chip is disposed on a carrier. A molding compound is formed on the carrier with a metal layer disposed thereon. The metal layer has an upper and lower surface, multiple cavities formed on the upper surface and multiple protrusions formed on the lower surface and corresponding to the cavities. The protrusions are embedded in the molding compound. The metal layer is patterned to form multiple pads on a portion of the molding compound. The carrier and the molding compound are separated. Multiple through holes are formed on the molding compound exposing the protrusions. A redistribution layer is formed on the molding compound and the active surface of the chip. Multiple solder balls are formed on the redistribution layer. A portion of the solder balls are correspondingly disposed to the pads.

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Patent Owner(s)

Patent OwnerAddress
CHIPMOS TECHNOLOGIES INCHSINCHU

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Cheng-Tang Hsinchu, TW 7 90
Liao, Tsung-Jen Hsinchu, TW 14 71
Peng, Mei-Fang Hsinchu, TW 2 13

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