DEPOSITION DEVICE FOR FORMING ORGANIC LAYER USING JOULE-HEATING AND DEVICE FOR FABRICATING ELECTROLUMINESCENT DISPLAY DEVICE USING THE DEPOSITION DEVICE
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United States of America Patent
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Issued Date -
Feb 28, 2013
app pub date -
Aug 22, 2012
filing date -
Aug 26, 2011
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Abandoned
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Abstract
There are provided a deposition device for forming an organic layer using Joule heating and a device for fabricating an electroluminescent display device using the deposition device that includes a cleansing device, an organic matter coating device, an electric field applying device and a loadlock chamber. The cleansing device cleanses a donor substrate. The organic matter coating device coats an organic matter on the donor substrate. The electric field applying device allows the organic matter to be transferred onto an element substrate. Here, the organic matter is heated by the Joule-heating generated by applying an electric field to the donor substrate having the organic matter formed thereon. The loadlock chamber loads or carries out the donor substrate into/from the electric field applying device. Accordingly, the present invention is advantageous in fabricating a large-scale element, and it is possible to increase a processing speed and to reduce device cost.
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