Rotating-element ellipsometer and method for measuring properties of the sample using the same

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United States of America Patent

PATENT NO 8830463
APP PUB NO 20130044318A1
SERIAL NO

13587442

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Abstract

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Provided is a real-time spectroscopic ellipsometer capable of obtaining information on properties of a sample, a nano pattern shape, in real time by measuring and analyzing, for a plurality of wavelengths, a change in a polarization state of incident light generated while being reflected or transmitted due to the sample when light having a specific polarization component is incident to the sample.

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Patent Owner(s)

Patent OwnerAddress
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCEDAEJEON 34113

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Che, Gal Won Yuseong-gu, KR 3 17
Cho, Hyun Mo Daejeon, KR 19 61
Cho, Yong Jai Yuseong-gu, KR 19 59

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