COATING DEVICE AND METHOD FOR OPERATING A COATING DEVICE HAVING A SHIELDING PLATE
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United States of America Patent
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Issued Date -
Feb 14, 2013
app pub date -
Feb 8, 2011
filing date -
Feb 17, 2010
priority date (Note) -
Abandoned
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Abstract
A device for treating a substrate (12) includes a conveying device (13) for loading and unloading substrates or masks (10, 10′, 10″, 10″′) into and from a process chamber (1) through loading openings (6, 7). A shielding plate (11), used to shield the substrate (12) or the mask (10) from the influence of heat is moved between a shielding position and a storage position during the substrate treatment and, after the substrate (12) is treated, from the storage position back into the shielding position. In the storage position, the shielding plate (11) is situated inside a storage chamber (2, 3).
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