Rotating MEMS Scanner
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United States of America Patent
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N/A
Issued Date -
Feb 7, 2013
app pub date -
Aug 4, 2011
filing date -
Aug 4, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Briefly, in accordance with one or more embodiments, a rotating scanning platform comprises a rotating body and two or more suspension flexures to support the rotating body at a first end of respective suspension flexures, wherein the suspension flexures have a length that is greater than a radius of the rotating body, and the suspension flexures are disposed at an offset from a center of rotation of the rotating body. The suspension flexures are fixed, respectively, to a substrate at a second end at a location that is closer to the center of rotation than to the first end of a respective suspension flexure to allow the rotating body to rotate about the center of rotation with generally linear rotation in response to a drive signal.
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