INTEGRATED MICROFLUIDIC DEVICE WITH ACTUATOR
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United States of America Patent
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Issued Date -
Feb 7, 2013
app pub date -
Aug 2, 2011
filing date -
Aug 2, 2011
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Abstract
An integrated microfluidic device has at least at least one active element controlled by pneumatic signals, and at least one electrostatic actuator integrated in the device for generating the pneumatic signals within the device from an external supply of pressure or vacuum. In one embodiment the pressure supply may be generated internally on chip using an integrated pump.
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