ARCHITECTURE FOR ANALYSIS AND PREDICTION OF INTEGRATED TOOL-RELATED AND MATERIAL-RELATED DATA AND METHODS THEREFOR
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United States of America Patent
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Issued Date -
Jan 31, 2013
app pub date -
Jul 27, 2011
filing date -
Jul 27, 2011
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Abandoned
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Abstract
Integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data (cause data) and material-related data (effect data) pertaining to at least one material processing tool and at least one material is disclosed. In an embodiment, the tool-related data is correlated with the material-related data, and the correlated tool-related data and material-related data is employed by logic to perform at least one of root-cause analysis, prediction model building and tool control/optimization. By integrating cause-and-effect data in a single platform, the data necessary for performing, for example, automated problem detection (e.g., automated root cause analysis) and prediction, is readily available and correlated, which for example shortens the cycle time to detection and facilitates efficient and timely automated tool management and control.
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