SYSTEMS AND METHODS FOR PROVIDING MIRRORS WITH HIGH STIFFNESS AND LOW INERTIA INVOLVING CHEMICAL ETCHING
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United States of America Patent
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Issued Date -
Jan 31, 2013
app pub date -
Jul 27, 2012
filing date -
Jul 29, 2011
priority date (Note) -
Abandoned
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Abstract
A method is disclosed of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, and exposing the at least one wall section to a fluid etching agent to thereby provide chemical milling of the mirror structure.
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