Positioning sensing and position servo control
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United States of America Patent
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Nov 12, 2013
Grant Date -
Jan 24, 2013
app pub date -
Sep 25, 2012
filing date -
Jan 28, 2011
priority date (Note) -
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Abstract
Implementations of actuators and capacitor-based position sensors for monitoring and controlling positioning of the actuators are provided, including implementations of actuators that use flexures to provide support to actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure. A positioning sensor, such as a capacitor sensor, is provided to measure and monitor positioning of the actuator and is coupled to a feedback circuit which uses the measured positioning of the actuator to control the actuator.
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