Atmospheric plasma equipment and waveguide for the same
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United States of America Patent
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Feb 18, 2014
Grant Date -
Jan 24, 2013
app pub date -
Jul 22, 2011
filing date -
Jul 22, 2011
priority date (Note) -
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Abstract
Provided is an atmospheric plasma equipment and a waveguide for the same. The atmospheric plasma equipment according to this disclosure includes: an oscillator supplying an electromagnetic wave; and a waveguide into which the electromagnetic wave generated from the oscillator is input to be propagated therethrough, wherein the waveguide includes at least one or more steps, and plasma is generated at a waveguide region including a final short portion. The atmospheric plasma equipment may simultaneously attain an effect of causing concentration of an electromagnetic wave applied through the waveguide with one or more steps and an effect of stably maintaining generated plasma.
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