Biaxial Drive Mechanism, Die Bonder and Die Bonder Operating Method
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United States of America Patent
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Issued Date -
Jan 17, 2013
app pub date -
Sep 6, 2011
filing date -
Jul 15, 2011
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Abandoned
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Abstract
A highly reliable biaxial drive mechanism and a die bonder operating method capable of preventing fall of an elevation axis of a linear motor upon loss of power are disclosed. The biaxial drive mechanism includes a handling part; a biaxial drive axes provided with a first linear motor unit having a first movable part that moves up and down the handling part along a first linear guide and a first stationary part, and a second linear motor unit having a second movable part that moves the handling part in a horizontal direction vertical to a direction of up and down movement and a second stationary part; a main power source that supplies a power source to the biaxial drive axes; and an elevation axis fall prevention unit that prevents fall of a handling part upon loss of power at the main power source.
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